报告题目：MEMS Scanning Mirrors and Their Sensing and Imaging Applications

 

主讲人：Huikai Xie

               Department of Electrical and Computer Engineering

               University of Florida

报告时间：2016年12月20日上午10:00

报告地点：重庆大学A区主教学楼1201会议室

 

Abstract:

Scanning micromirrors are MEMS devices that can steer, modulate and switch light. In addition to being widely used in portable projectors, scanning micromirrors can be applied in numerous sensing applications such as laser beam steering, 3D mapping, micro-lidar, micro-spectrometers, compressive sensing cameras, and endomicroscopy. In all these applications, scanning micromirrors are the enabling device for miniaturization and integration. In this tutorial, the principles of electrostatic, electromagnetic, electrothermal and piezoelectric actuation mechanisms will be first introduced. Then the designs and fabrication technologies of various MEMS mirrors based on these actuation mechanisms will be presented. After that, four application areas will be discussed in detail, including micro-lidar, micro-spectrometers, compressive sensing cameras, and endomicroscopy. For each application area, theoretical background and the state of th art will be briefly reviewed, followed by a more compressive introduction of one or two specific examples. Finally, the remaining challenges, development trends and more potential applications of scanning micromirrors will be discussed.

 

Biography: Dr. Huikai Xie is a Professor at the Department of Electrical and Computer Engineering of the University of Florida. He received his BS, MS and Ph.D. degrees all in electrical engineering from Beijing Institute of Technology, Tufts University and Carnegie Mellon University, respectively. Before he joined the University of Florida as an assistant professor in 2002, he worked at Tsinghua University (1992-1996), Bosch Corporation (2001), and Akustica Inc. (2002). He has published over 250 technical papers and holds 30 US patents. His current research interests include MEMS/NEMS, integrated inertial sensors, microactuators, optical MEMS, biophotonics, IR spectroscopy, and micro-LiDAR. He has founded two startup companies - WiOptix Inc. in Florida and WiO Technologies in Wuxi, China, and also co-founded another startup company - Senodia Technologies in Shanghai. He has served on the technical program committees of several international conferences and the editorial boards of several international journals.

 

 

主办单位：光电技术及系统教育部重点实验室